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Trioptics GmbH
(formerly FISBA OPTIK AG)
µPhase® interferometers offer objective and precise measurement results of surface and wavefront measurements - quickly and reliably. µPhase® interferometers are recognised for their unique features:

  • Compact size, modularity and arbitrary working orientation
  • Wide field of view alignment mode
  • High resolution cameras either 500x500 or 1000x1000 pixel
  • Measurement accuracy traceable to international standards
  • High flexibility: convertable from Twyman-Green to Fizeau mode
  • Standard measuring wavelength 632.8 nm (other wavelengths available)
  • Object-plane focusing ability (µPhase® 1000 only)
  • Robust, dust-proof housing

    TRIOPTICS are able to offer µPhase® interferometers as self-contained modular systems as well as predefined turnkey solutions. The different parts of the µPhase® interferometer line are all compatible and form powerful measurement devices.

    µShape™ Interferometer Software

    µShape™ Interferometer Software was originally developed for the µPhase® compact interferometers, today interferometers from other manufacturers work with µShape™ too. With its clear and menu driven user interface µShape™ perfectly deals with the variety of measurement requirements and provides several modules which expand the capabilities of µShape™.

    The µShape™ software operates with all Windows®systems including Windows® 7 and is designed for ease-of-use as well as full functionality. It controls and displays the measurement results, stores and documents all measurement raw data and ensures maximum transparency and traceability.

    µShape™ Add-On Modules

    For extended measurement tasks and further analysis the µShape™ software offers a great variety of add-on modules which can be added by the user if needed. Among these are:

  • Analysis of aspheric surfaces in spherical or CGH setups
  • Analysis of cylindrical or toric surfaces
  • External communication interface for controlling the interferometer by external programs, eg. in an automated system
  • Measurement of the homogeneity of glass plates
  • MTF analysis of focal or afocal optical components and systems
  • Measuring multiple apertures in one shot, eg. on polishing heads
  • Statistical analysis of multiple sub-apertures at the same time
  • Prism and wedge measurement and analysis
  • Considering known sample deviations eg. deviations caused by the optical design
  • Analysis of the tool offset of lathe machines
  • Analysis of wafer plates
  • Roughness and PSD analysis
  • Static fringe analysis for fast measurements in instable environments

    Link to Trioptics Website

    Download more information

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