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SIOS Messtechnik GmbH


Nanopositioning & Nanomanipulation system NMM1

  • X-, Y- and Z-axis resolution of ~0.1nm
  • Measurement volume 25 x 25 x 5mm
  • Choice of probe depending on application
  • AFM, autofocus, fixed focus, inductive, capacitive sensors
  • Surface mapping
  • Industrial surface testing
  • Ideal for MEMS/MOEMS and microstructures

    Link to SIOS Website

    View 3D profiling application examples

    Click here to download a pdf of the technical specification of the Nanopositioning & Nanomanipulation system NMM1
  • Nanopositioning & Nanomanipulation system NMM1


    Nanopositioning & Nanomanipulation system NMM1



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