Plane mirror & retroreflector interferometers
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SP Series
Single beam, plane mirror distance measuring interferometer
Measuring resolution as small as 0.1nm over 5m range
Atmospheric condition variation compensation (T,P)
View SP Series PDF
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SP- D Series
Double beam, plane mirror distance measuring interferometers
Measuring resolution as small as 0.1nm over 2m range
Atmospheric condition variation compensation (T,P)
Dual beam system allows simultaneous measurement of angular displacement
View SP-D Series PDF
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SP-TR Series
Triple beam, plane mirror distance measuring interferometers
Measuring resolution as low as 01.nm over 2m range
Atmospheric condition variation compensation (T,P)
Triple beam system enables triaxial measurement, or 2 axes plus angle of third axis to be
measured simultaneously
View SP-TR Series PDF
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MC Series retroreflector interferometers
Single beam, retroreflector distance measuring interferometers
Measuring resolution as low as 0.1nm over 5m range with distance rate change as high as 600mm/s
View MC Series PDF
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MI Series miniature retroflector interferometers
Single beam retroflector distance measuring interferometers
Measuring resolution as low as 0.1nm over 5m range with distance rate change as high as 600mm/s
View MI Series PDF
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