SIOS GmbH Laser focus sensor

SIOS GmbH  Laser focus sensor

SIOS GmbH Laser Focus Sensor Head Image

The SIOS LSF is an optical scanning sensor that has been specially designed for use with the SIOS NMM-1 Nanopositioning and Nanomeasuring Machine (NMM) and operates as a zero-point (null-point) sensor. All metrological procedures, i.e., motions of the object being measured on all three coordinate axes, are controlled by our NMM-1 Nanopositioning and Nanomeasuring Machine, and are based on signals transmitted by our Laser Focus Sensor to the NNM-1.

Read more by downloading the SIOS GmbH laser focus sensor brochure or review the other sensors manufactured by SIOS GmbH.

For your demonstration please contact Armstrong Optical (44 (0)1604 654220) or CLICK HERE

SIOS oil drop


Price: £0.00

SIOS GmbH NMM-1, Nano positioning & Nanomanipulation System

SIOS GmbH Nano positioningSIOS GmbH nano positioning Machine Image

The SIOS Nano positioning and Nano Measuring Machine NMM-1 enables three-dimensional coordinate measurement in the range of 25 mm x 25 mm x 5 mm with a spatial resolution of 0.1 nm. The axes of the three SIOS SP interferometers intersect with the contacting point of the probe sensor at the object being measured and this unique arrangement provides Abbe error free measurements on all three axes. The object to be characterised is placed directly on a movable mirror corner the position of which is monitored  by the three fixed miniature SP interferometers and moved by a three axis electrodynamic driving system. Any angular deviations that may occur during the positioning process are measured and corrected by additional two SIOS GmbH angle sensors.

The Iight of three stabilised Iasers are guided from the electronics unit to the interferometer heads by fibre optic Iightguides, providing a compact. thermally stable set up of the Nano positioning and Nano Measuring Machine. The heart of its remote electronics unit is a digital signal processor (DSP) that processes all incoming signals, controls its drive system and governs the course of measurement procedures.


Characteristics and applications of the SIOS NNM Nano positioning Machine
  • X-, Y- and Z- axis resolution of ~ 0.1nm
  • Choice of probe depending on application including AFM, autofocus, SIOS Laser focus, inductive, capacitive, SIOS white light sensors
  • Surface mapping
  • Industrial surface testing
  • Ideal for MEMS, MOEMS and microstructures

For your demonstration please contact Armstrong Optical (44 (0)1604 654220) or CLICK HERE

Click here to download a pdf of the technical specification of the Nanopositioning & Nanomanipulation system NMM-1


Price: £0.00

SIOS GmbH White light interferometer

SIOS white light interferometer

SIOS GmbH white light interferometer


The SIOS WLI new white light interferometer sensor for use on the NMM-1

Click here to download a pdf of the white light interferometer Sensor for NMM-1. For your demonstration please contact Armstrong Optical (44 (0)1604 654220) or CLICK HERE

SIOS GmbH White Light Interferometer sensorSIOS GmbH White Light interferometer Fringes

Price: £0.00