High precision laser interferometers with multiple beams for simultaneous measurements of length, angle and straightness for calibration and alignment of axes of measuring machines like CMM‘s and machine tools. SIOS recommend the use of wireless sensors or the climate measuring station to achieve the best results.

 

 

Laser interferometer Model SP 15000 C3/C5

SIOS-Laser-interferometer-model-SP-15000 C3 C5-min

 

Overview:

  • interferometric measurement of up to 5 DOF of movement
  • diverse accessories for attachment of sensor head and optical components available
  • calibration software according to DIN and ISO standards

 

Applications:

  • Calibration of high-precision axes in measuring and machine tools, as well as coordinate measuring instruments
  • Laserinterferometric measurements on guides and translation stages
  • Ultraprecise simultaneous length and angle measurements
  • Differential measurements

 

Technical Data:

Length measurement

  • Measuring range: 15 m (up to  50 m)
  • Length resolution: 20 pm
  • Beam distance: 50 mm

Angle measurement

  • Measuring range: up to ±5°
  • Angular resolution: < 0.01 arcsec (up to 0.0004 arcsec)

Straightness measurement

    • Measuring range: ±4 mm
    • Resolution: 10 nm
    • Axial range (in measuring range freely selectable): < 6.5 m

 

Laser interferometer model SP 5000 TR

 

High-precision laser interferometers with three perfectly aligned and independently working measuring beams for simultaneous measurements of length and angle. Either a mirror or the included reflector combination can be used as a reflector. Optionally, an alignment aid can be integrated in the sensor.

SIOS-Laser-interferometer model SP 5000 TR

 

Overview:

  • simultaneous length measurements as well as pitch and yaw
  • angle acquisition with the highest accuracy
  • beam distances 12 mm
  • OEM and vacuum versions of the device are possible

 

Applications:

  • Laser-interferometric measurements on guides and translations, microscopes, measurement and positioning stages
  • High precision pitch and yaw corrections during biaxial or multi-axial length measurements
  • Calibration of metrological equipment and machine tools
  • Differential measurements (dilatometry, materials testing)
  • Extension of the measuring range for angle measurement upon request

 

Technical Data

  • Measurement range: up to 5 m
  • Beam distance: 12 mm
  • Angle resolution: 0.002 arcsec
  • Angle measurement with reflector: until ±12.5°

 

 

Laser interferometer model SP 5000 C5 2D

 

 

Overview:

  • simultaneous recording of 5 DOF in one setup
  • measurement of straightness with micrometer accuracy
  • suitable for high-precision alignments of machine components
  • calibration software according to DIN and ISO standards

 

Applications:

  • Calibration of high-precision axes in measuring and machine tools as well as coordinate measuring instruments
  • Ultraprecise alignment of machine components
  • Laser interferometric measurement at guides
  • Simultaneous length and angle measurement

 

Technical Data:

  • Length measurement - Measuring range 6 m    Resolution 20 pm
  • Angle measurement - Measuring range ±5° Resolution 0.0008 arcsec
  • Straightness measurement - Measuring range ±4 mm/±2 mm   Resolution 10 nm/0.1 μm
 
Additional Information
Calibration Laser Interferometer
Triple-beam interferometer - Modern regarding function and design
Triple-Beam Plane-Mirror Interferometer
SP 5000 NG Product Information
Laser Interferometer Data Sheet

 

For your demonstration please contact Armstrong Optical (44 (0)1604 654220) or CLICK HERE

Price: £0.00