The SIOS Nano positioning and Nano Measuring Machine NMM-1 enables three-dimensional coordinate measurement in the range of 25 mm x 25 mm x 5 mm with a spatial resolution of 0.1 nm. The axes of the three SIOS SP interferometers intersect with the contacting point of the probe sensor at the object being measured and this unique arrangement provides Abbe error free measurements on all three axes. The object to be characterised is placed directly on a movable mirror corner the position of which is monitored by the three fixed miniature SP interferometers and moved by a three axis electrodynamic driving system. Any angular deviations that may occur during the positioning process are measured and corrected by additional two SIOS GmbH angle sensors.
The light of three stabilised lasers are guided from the electronics unit to the interferometer heads by fibre optic lightguides, providing a compact thermally stable set up of the Nano positioning and Nano Measuring Machine. The heart of its remote electronics unit is a digital signal processor (DSP) that processes all incoming signals, controls its drive system and governs the course of measurement procedures.
3D-multisensor positioning and measuring system with the highest accuracy
- Customized probe systems, e.g. laser focus sensors LFS-series, scanning tunnelling and scanning atomic force microscopes, white light interferometer, 3D-micro probes
- Operation modes:
1) dynamic positioning system
2) measuring system operating in either continuous-scan mode or single-step mode
Control of NNM-1 employs an easy to use script language running on the host PC
Positioning, manipulation, processing and measurement of objects in the fields of micromechanics, microelectronics, optics, molecular biology and microsystems engineering with nanometric precision within a large range
- Measurement of precision parts, such as the tips of hardness membranes and micro lenses
Calibration of step height standards and pitch standards
- Measuring and positioning range: 25 mm x 25 mm x 5 mm
- Resolution: 0.1 nm
SIOS GmbH Laser focus sensor
The SIOS LSF is an optical scanning sensor that has been specially designed for use with the SIOS NMM-1 Nanopositioning and Nanomeasuring Machine (NMM) and operates as a zero-point (null-point) sensor. All metrological procedures, i.e. motions of the object being measured on all three coordinate axes, are controlled by our NMM-1 Nanopositioning and Nanomeasuring Machine, and are based on signals transmitted by our Laser Focus Sensor to the NNM-1.
Read more by downloading the SIOS GmbH laser focus sensor brochure.
SIOS GmbH white light interferometer
The SIOS WLI new white light interferometer sensor for use on the NMM-1